Hiwin Dual Axis Customization - DLJ
ไฮวิน Dual Axis Customization - DLJ
Hiwin Dual Axis Customization - DLJ : The semiconductor wafer inspection equipment, AOI equipment.
รายละเอียด (Detail) Hiwin Dual Axis Customization - DLJ
- Intrgration of high-precision torque motor.
- XY positioning with high precision angular compensation.
- Low center of gravity design.
- With short setting time.
- Excellent servo stability.
- Use low dust flat cable (class 1).
- Can be equipment with ironless or ironcore motor.
ขนาด (Dimensions) Hiwin Single Axis Customization - DLJ
รายละเอียดทางเทคนิค (Specifications) Hiwin Single Axis Customization - DLJ
| Stage type | LMX2C-SA11LAS21L-420-490+TMF42 |
|---|---|
| Motor Type | Ironcore(/Ironless) motor |
| Stroke(mm) | X-axis : 420, Y-axis : 490 |
| Peak Force(N) / Continuous Force(N) | X-axis : 254/90, Y-axis : 462/149 |
| Repeatability(µm) | ±0.5 (with HIWIN solution) |
| Accuracy(µm) | ±2 (after error mapping) |
| Max. Acceleration(m/s2) | 6.5(with payload) |
| Max. Velocity(m/s) | 0.5(with payload) |
| Vertical Straightness(µm) | ±10 |
| Orthogonality(arc-sec) | ±5 |
| Payload(kg) | 10 |
| Stage orientation | Horizontal |
| Torque Motor Type | TMF42 |
| Peak Torque(Nm) / Cotinuous Torque(Nm) | 3.6/1.2 |
| Max. Velocity(rpm) | 120(220V) |
| Repeatability(arc-sec) | ±2.5 |
| Accuracy(are-sec) | ±25 |
| Inertia of rotation parts(kgm2) | 0.0005 |
*Note : All specifications can be designed according to customer demand.
