Hiwin Air bearing Stage
ไฮวิน Air bearing Stage
HIWIN Air bearing Stage : Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.
